Befar Group Achieves Mass Production of 6N-Grade High-Purity Hydrogen Fluoride
Befar Group Achieves Mass Production of 6N-Grade High-Purity Hydrogen Fluoride
Kamis, 23 Juli 2026 | 13:43
BINZHOU, CHINA -
Media OutReach Newswire
- 22 July 2026 - On July 19, Shandong's Befar Group achieved a
technological breakthrough in four key areas of process, engineering,
testing, and filling to bring its high-purity hydrogen fluoride (HF) for
semiconductor applications to the 6N grade (99.9999%). This milestone
fills a production gap for high-purity hydrogen fluoride in Shandong
Province.
High-purity hydrogen fluoride is a key raw material used in
semiconductor chip etching and cleaning processes, often referred to as
the "chemical scalpel" of semiconductor manufacturing. The 6N-grade
product is an essential material for advanced process nodes of 28
nanometers and below. For years, core production technologies for this
grade have been mainly provided by overseas companies, with domestic
supply heavily reliant on imports.
Befar Group overcame key technical hurdles, including multi-stage
distillation coupling, selection of low-precipitation equipment
materials, cylinder cleanliness and protection, and precise detection of
trace impurities. The company maintains key metal-ion impurity levels
below 1 part per billion (ppb), solving the problem of secondary
contamination throughout the entire production, storage, and
transportation chain. To date, the company has completed the
construction and commissioning of a 50-ton-per-year high-purity hydrogen
fluoride cylinder filling line. Having obtained the cylinder filling
license from the Shandong Special Equipment Inspection Institute, the
company has begun introducing its products to major customers at home
and abroad. This marks a complete closed loop from laboratory R&D to
industrial-scale production.
Thanks to its mass production capabilities, Befar Group will continue to
deepen its expertise in high-end specialty gas technologies, expand its
product portfolio of halogen-based electronic specialty gases, and
develop electronic-grade hydrogen chloride, hydrogen bromide, and other
series products. By increasing locally supplied capacity, the company
aims to ensure the secure and stable operation of the semiconductor
industry chain.